EpiPhotonics pioneers the design and manufacture of efficient PLZT photonic components and subsystems for advanced optical applications. EpiPhotonics' unique and proprietary epitaxial PLZT waveguide technology based on 20 years of R&D features radical performance gains compared to traditional technologies in terms of speed, power consumption, integration, dimensions, and robustness.

High-Speed PLZT Optical Switches
1xN Optical Switches

NxN Optical Switches

High-Speed PLZT Optical Switching Systems
Optical Switching Systems

High-Speed PLZT VOA
Fast VOA

Custom PLZT Photonics
Tunable Filters and Deflectors

Specialty Fiber Arrays
Pigtailed Small Core Fiber Arrays

Fabrication Services
PZT/PLZT Deposition and Patterning

Dicing and Polishing


EpiPhotonics conducts full range of processes starting from device design, PZT and PLZT thin film wafer fabrication in its own clean room, packaging, and testing.
Design: Simulators, CAD.
Thin film deposition: RTA, Sputtering, E-beam deposition, etc.
Microfabrication: Spinner, Aligner, Baking truck, Asher, Dry etcher, etc.
Post wafer: Dicer, Polisher, Wire bonder, Fiber aligner, etc.
Testing: Switching curve, IL, PDL, RL, WDL, etc..

PZT/PLZT Deposition and Microfabrication
EpiPhotonics is the expert of oxide thin-film technology including PZT/PLZT devices. EpiPhotonics provides high quality PZT and PLZT thin films based on its unique chemical solution deposition technology for photonics and piezoelectrics/MEMS, and microfbrication of PZT/PLZT thin films.

PZT thin film deposition (1 um-3 um) on Pt/Ti/SiO2/Si wafers for piezoelectrics/MEMS
PLZT waveguide deposition (3 um-8 um) on single crystal oxide wafers
Micro-patterning of PZT/PLZT
Metal layer deposition (Pt, Au, Ti, Cr, ITO) and patterning

Example of epitaxial PZT thin film: cross section and etched pattern (SEM)

Dicing and Polishing
EpiPhotonics dices waveguide wafers and polishes waveguide end faces.

EpiPhotonics aligns and connects optical fibers to polished waveguides.