As the electronic devices continue to scale-down, the purification of ALD&MOCVD precursors used in the manufacturing processes of semiconductor, display and solar-cell technology has become more critical. UP Chemical provide various ALD&MOCVD precursors with the highest purities (5N, 6N, and higher) for dometic and international semiconductor industries up to multi-kilogram scales.
Al
Precursor Applications
TMA DRAM Capacitor High-k, OLED Encapsulation, OLED Storage Capacitor
Si
Precursor Applications
BDEAS (ZOA130) DRAM & Flash Dielectric
BTBAS DRAM & Flash Dielectric
DIPAS DRAM & Flash Dielectric, OLED Encapsulation
HCDS DRAM & Flash Dielectric
Tris-DMAS DRAM & Flash Dielectric
Ti
Precursor Applications
TDMAT DRAM High-k & Barrier & Metal, OLED Encapsulation
TiCl4 DRAM & Flash Dielectric
Cr
Precursor Applications
Cr(CO)6 LCD Repair Cr Metal
Zn
Precursor Applications
DEZn Display TCO Materials
Ge
Precursor Applications
TDMAGe PCRAM (GST) Ge Precursor
Zr
Precursor Applications
Cp-Zr (ZOA203) DRAM Capacitor High-k, OLED Storage Capacitor
Mo
Precursor Applications
Mo(CO)6 LCD Repair Mo Metal
Ru
Precursor Applications
Ru(EtCp)2 DRAM Capacitor Metal Electrode
Sn
Precursor Applications
TDMASn TCO Materials
TMSn TCO Materials
Sb
Precursor Applications
TDMASb PCRAM (GST) Sb Precursor
Te
Precursor Applications
Te(tBu)2 PCRAM (GST) Sb Precursor
Hf
Precursor Applications
Cp-Hf DRAM Capacitor High-k, CIS High-k
Ta
Precursor Applications
TBITEMATa DRAM Capacitor High-k, DRAM Barrier & Metal
TBTDET DRAM Capacitor High-k, DRAM Barrier & Metal
W
Precursor Applications
W(CO)6 LCD Repair W Metal
Etc.
Precursor Applications
Ceramable DRAM & Flash STI & ILD Gap-Filling Oxide
Coatalent Series Hard coating, Anti-glare coating, Gas barrier coating, Overcoating, Anti-corrosion coating, Insulation coating
Coatenall Series Hard coating, Anti-glare coating, Gas barrier coating, Overcoating, Anti-corrosion coating, Insulation coating
