Vaisala offers trusted and reliable measurements for semiconductor manufacturers and MEMS foundries, semiconductor equipment vendors, fab operators, and material suppliers.
The semicon process refractometers are for in-line concentration monitoring in bulk chemical and slurry delivery dispensing, and point-of-use blending, spiking, and polishing processes.
Vaisala's accurate measurement instruments of air pressure, temperature, and humidity provide precise data on the manufacturing environment and offer superior accuracy, long-term stability, and rapid response time.
Vaisala K-PATENTS® Semicon Refractometer PR-23-MS
for semiconductor liquid chemical processes
A compact refractometer with an ultra-pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a ¼ — 1 inch pillar or flare fitting.
Vaisala K-PATENTS® Semicon Refractometer PR-23-MS has a built-in, ultra-pure, modified PTFE flow cell designed to keep all metal and corroding parts from coming into contact with the process liquid. All the wetted parts are made of ultra-pure, modified PTFE. The prism material is sapphire.
The PR-23-MS is mounted directly in-line with a pillar or flare fitting. The compact design allows integration to a wet bench or to a cabinet, where the need for foot print area is very low.
The dissolved solids concentration is determined by making an optical measurement of the solution’s Refractive Index. The advantage of this principle is that the same instrument can be used to measure any chemical.
The PR-23-MS provides a continuous 4-20 mA or digital measurement signal and immediate feedback to the control system, if the chemical is not within specifications. The PR-23-MS is physically a small device and easy to install in the bulk chemicals dispense, and in point of use chemical blending, spiking and monitoring applications.
Vaisala K-PATENTS® Semicon Refractometer PR-33-S
for semiconductor liquid chemical processes
A compact refractometer with an ultra pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a ¼ — 1 inch pillar or flare fitting.
Vaisala K-PATENTS® Semicon Refractometer PR-33-S monitors the fab chemicals' concentration in cleanroom environment and in the integrated process tools (blending, clean, etch, and CMP).
