Founded in 2000 and based in Goleta (California, USA), AMS was created with only one goal: becoming the top supplier of equipment for BAW/SAW/FBAR/piezo-MEMS applications. With over 3 millions of wafers manufactured with AMS tools, a large installed base and the new Generation 5 product line, launched in 2015 AMS have achieved its initial goal. A comprehensive continuous improvement plan still in place grant AMS customers to be on the top for these applications.
The AMS product offer includes single chamber and cluster tools for BAW/SAW/FBAR/piezo-MEMS applications. The combination of a state-of-the-art Magnetron array with an advanced trimming technique allows the deposition of thin films of Piezoelectric Aluminum Nitride, AlScN and Electrodes Materials likeMo, W, Ti, TiN, Ru, Pt, Cu, Al, etc with outstanding properties. Excellent uniformity, stress, crystallinity, surface roughness control and frequency adjustments are only some of the main advantages of AMSystems tools.
Deposition of Piezoelectric (aluminum nitride, doped AlN), Dielectric and Metal (molybdenum, tungsten, titanium and other materials) thin films
Our PVD System is based on cluster tool architecture which can be configured with multiple chambers, including pre-cleaning module, PVD modules, Ion Beam Trimming module and one or two Cassette (Loadlock) Modules. We supply the following configuration of PVD modules:
Dual Magnetron (AC/AC or AC/DC powered)
Single Magnetron (DC powered)
Features
Precise Laser Interferometer Thickness Control
Wafer rotation mechanism for uniform film properties, especially important for doped AlN films
Magnetic field adjustment for precise stress uniformity control
Dual Magnetron and high-density plasma configuration has been designed specifically for reactive processes and for improved film crystallinity on piezoelectric films
Substrate RF bias
A computer running standard Microsoft Windows software allows users to easily and intuitively operate the system.
System can be easily expanded to include a combination of Trimming and PVD modules as process requirements change.
The use of standardized modules and components minimizes the variety of spare parts required.
Ion Beam Film Thickness and Frequency Trimming/Tuning
AMSytems supplies different configurations of the Trimming system:
Single trimming module with semi-manual load
Trimming System with multiple Trimming Modules or combination of Trimming and PVD modules on the same platform
Features
Up to 50X ultimate thickness uniformity improvement
Zero minimum thickness loss if needed (patent pending)
Film thickness distribution adjustment to +/- 4A
Surface Roughness Improvement
Simple and robust transfer mechanism
DC based Ion Source with Hollow Cathode Neutralizer - no filaments, no grids, simple maintenance, high up time
Millisecond response time
Thickness adjustment - of any Conductive and Non-conductive films
Cluster Tool combines Trimming and PVD Modules for robust and economically advantageous approach to high scale manufacturing
A computer running standard Microsoft Windows software allows users to easily and intuitively operate the system
The use of standardized modules and components minimizes the variety of additional parts required since many parts are interchangeable
PVD Deposition and Etch/Trimming/Tuning Processes
AMSystems is fully equipped to provide in-house thin film deposition, ion milling, thickness/uniformity trimming, comprehensive testing, and production in low and high quantities.
AMSystems provides an extensive range of custom thin film deposition range from 100A to 70,000A, including:
Piezoelectric films, such as aluminum nitride (AlN) or doped AlN thin films
Metal films, such as molybdenum (Mo), tungsten (W), titanium (Ti) and other films
Dielectric films
We provide frequency/thickness tuning for any thin films to within 0.05% uniformity across substrate and thickness adjustment up to +/- 4A of the required thickness.
AMSystems specializes in providing complete solution in FBAR/BAW/p-MEMS piezoelectric and electrode depositions as well as frequency/thickness trimming.
