Metal bellows
Load Lock Bellows
Pluger/Bellows Assy RPDA
Bellows,Wafer Lift 300mm
300 Yoke Slit Valve Bellows
INOVA Pedestal Bellows
Back Side Air Bump Bellows
DPS II AXIOM Lift Bellows
Ultima Lift Bellows
DPS II Metal SLD Bellows
Over Etch Station Bellow
Valve
Rectangular Gate Valve
Protection Gate Valve
Auto Gate Valve
Pneumatic Gate Valve
Manual Gate Valve
Remote Plasma Control Valve
HeatedAngle Valve
2Stage Angle Valve
Butterfly Gate Valve
Rendulum Gate Valve
Metal Heater
Innova Pedestal Assy through Hole
200mm Standard Heater
200mm HTHU heater
300mm A101 Heater Assembly
300mm B101 Heater Assembly
Magnetic Seal
Spindle Assy,Index,Oil Filled,C3ALT
200mm Sequel Spindle
300mm Serco Motor Spindle
Through Hole Mount Feedthrough
Hollow Shaft Feedthroght
Through Hole Mount Feedthrough
Low Shaft Feedthrough
Assembly
AMAT Endura Lift Assembly
AMAT Endura Lift Assembly
AMAT 300mm Heater Lift Ass’y
AMAT 200mm Heater Lift Ass’y
ESC(Electrostatic Chuck)
200mm Inova 2 Gap Std ESC
300mm Inova 2 Gap Hi-Temp Pink ESC
300mm Inova Low E/D Pedestal
300mm Inova Hi E/D Pedestal
300mm Inova Hi E/D Pedestal
300mm Inova PMAG Pedestal
300mm Inova TD4 Pedestal
300mm Inova CIP1 Pedestal (RF Controlled)
100 mm STS / SPTS ESC Double sided ,3 lift pins on Ø 30 PCD
125 mm STS / SPTS ESC Double sided ,3 lift pins on Ø 30 PCD
150 mm STS / SPTS ESC Double sided ,3 lift pins on Ø 30 PCD
200 mm STS / SPTS ESC Double sided ,3 lift pins on Ø 30 PCD
4 inch STS / SPTS TD ESC
6 inch STS / SPTS TD ESC
8 inch STS / SPTS TD ESC
100mm STS / SPTS / Alcatel ESC
150mm STS / SPTS / Alcatel ESC
150mm STS / SPTS / Alcatel ESC
150mm STS / SPTS / Alcatel ESC
200mm STS / SPTS / Alcatel ESC
200mm STS / SPTS / Alcatel ESC
Varian Viista 200mm ESC
Varian Viista 200mm ESC
Varian Viista 200mm ESC
Varian Viista 300mm ESC
Varian Viista 300mm ESC
LCD Valve
