FATRI has advanced chip design and processing equipment (cleaning, wet etching, ion etching, LPCVD, mechanical chemical polishing, encapsulating, photoetching, magnetron sputtering, bonding, etc.) and sophisticated micro-nano-detection equipment, including electron microscope, AFM(atomic force microscope), ellipsometer, probe station, high precision electric performance testing platform, etc. FATRI also developed chips including MEMS, ASIC and microfluidic medical chip.
