Electronic Chemicals for the Semiconductor Industry
High purity combined with extremely low metal contamination make SEMICOSIL® electronic silanes a key material for the semiconductor industry. As one of the world’s largest producers of silanes, WACKER boasts an innovative portfolio of additives for producing microelectronic components, raw materials for process optimization and precursors for depositing insulating layers in CVD chambers.
Silanes for Chemical Vapor Deposition (CVD) and Spin-On Dielectrics (SOD)
Silanes for Photolithography
Silica for Chemical-Mechanical Polishing (CMP)
Hyperpure Hydrogen Chloride for Etching
