About Rogue Valley Microdevices
Founded in 2003, and based in Medford, Oregon, Rogue Valley Microdevices maintains a MEMS Devices foundry. We support our customers from early R&D through pilot production.at work - Rogue Valley Microdevices
We are a full-service MEMS foundry, combining state-of-the-art process modules with the engineering expertise to go seamlessly from custom design to manufacturing. We also offer pre-processed silicon wafers ready to ship in our online shop.
Company Core Values:
As a company, our core values keep us true to our ultimate purpose, which is to use technology as a tool to improve the quality of life for all people around the world.
Tenacity – What separates us from those who do not reach their goals.
Teamwork – How we accomplish greatness.
Humility – A virtue that enables us to be compassionate and understanding of others.
Quality – We are proud of what we do.
Integrity – The reason we are trusted.
Silicon Wafer Online Inventory -In-Stock Ready-to-Ship
High-Volume Manufacturing Capabilities- Our wafer fabrication facility has the capacity to handle high-volume manufacturing but is flexible enough to accommodate your most sensitive processing needs.
Wafer services are available for both silicon wafers and non-standard wafer materials such as quartz, sapphire, and aluminum nitride. Processing can be performed on customer-supplied material or wafers can be purchased along with any service of your choice.
Beyond our MEMS fab, we also maintain a comprehensive inventory of pre-processed, ready-to-ship wafers via our online wafer store — with over 50 unique waferdielectric and conductive thin films and all services performed in our own class 100 cleanroom.
We’re dedicated to providing high-quality manufacturing and engineering services for a wide variety of applications, including semiconductors, biotechnology, nanotechnology, and MEMS.
MEMS Foundry
We understand that a good MEMS Foundry relationship is essential to our customers’ success. We engage in open dialog with our customers, prioritizing their needs and goals every step of the way. In practical terms, if a customer is content with existing supply chains, we honor and support those relationships.
MEMS manufacturing processes are unique to each customer but that is no reason to get proprietary. We share engineering-level data with our customers, freeing you to bring up a process at Rogue Valley Microdevices that you will later use for high-volume production at a larger fab.
Rogue Valley Microdevices is MEMS fab, including gold and platinum as part of our normal processing — without the many restrictions that many fabs place on their use. We pride ourselves on providing high-quality wafers services our customers can count on. Rogue Valley Microdevices will partner with your existing team and will always assure that you are receiving the very best in service and engineering.
Wafer Services & Fabrication Facility
Our wafer services and fabrication facility has the capacity to handle high-volume manufacturing but is flexible enough to accommodate your most sensitive processing needs. Services are available for both silicon wafers and non-standard wafer materials. For examples of how we’ve partnered with other innovative companies, review our partnership case studies here.
MEMS Foundry Overview
mems wafersMEMS technology is rapidly becoming a technology we cannot live without. MEMS devices are dominating the market and enabling new innovative technology products. From the MEMS pressure sensors used in modern automotive manufacturing to the accelerometers found in your cell phone, there is no doubt that MEMS are going to be a big part of our future and Rogue Valley Microdevices is ready.
Specializing in MEMS and Biomedical Device fabrication, Rogue Valley Microdevices is a full service MEMS foundry that combines state-of-the-art process modules with the engineering expertise to seamlessly go from custom design to device manufacturing.
In-House Front-End MEMS Processing
All front-end processing is performed in-house and under the supervision of our experienced process engineering team. With an extensive list of process capabilities, our MEMS Foundry eliminates the need for customers to use multiple suppliers. Maintaining all MEMS process capabilities in-house enables us to decrease manufacturing lead-times while improving device yield and performance. We strive to provide you with Superior Quality and Customer Service.
Rogue Valley Microdevices MEMS Foundry Offers:
Photo Mask Layout
Device fabrication on Sapphire, Quartz and Ceramic
MEMS fabrication on CMOS Wafers
Suspended membrane fabrication
Front to back alignment
I-Line stepper lithography
Photoresist spray coat
Precious metal deposition and patterning
Multi-layer metal films including Au/Sn solder
Reactively sputtered dielectric and resistive materials
LPCVD and PECVD Dielectric film deposition
KOH and TMAH Silicon Etch
Metal liftoff processing
Polyimide Processing
Dielectric and Conductive Thin Films Wafer Services
With over fifty unique dielectric and conductive thin films, Rogue Valley Microdevices maintains the broadest and most comprehensive set of wafer services commercially available. All services including LPCVD nitride deposition are performed in our own class 100 cleanroom under the supervision of an experienced engineering team.
LPCVD Film Deposition
Standard Nitride
Low Stress Nitride
Undoped Polysilicon
Thermal Processing
Wet Thermal Oxide
Dry Thermal Oxide
Dry Chlorinated Thermal Oxide
Thermal Annealing
Conductive Film Deposition
E-Beam Evaporation
Sputter Metal Deposition
PECVD Deposition
Standard Oxide
Slow Deposition Oxide
OxyNitride with custom refractive index
Standard Nitride
Low Stress Nitride
Etch Services
Wet Metal Etch
Deep Reactive Etch (DRIE)
Wet & Dry Silicon Etch
Dry Oxide Etch
Polyimide Etch
Tantalum Nitride Etch
Spin and Spray Coat Services
Spray Coat AZ Photoresist
Spin Coat AZ Photoresist
Polyimide Spin Coat
