In 2002, LumArray was spun off from MIT’s NanoStructures Laboratory (NSL) which, in 1978, was spun off from MIT Lincoln Lab. The NSL students and staff have a long history of innovations in micro- and nanofabrication techniques including: comformable-photomask lithography, x-ray lithography, interferometric alignment, the phase-shift mask, the attenuating phase shifter, phase-locked interference lithography, spatial-phase-locked e-beam lithography, achromatic-interference lithography (AIL), coherent-diffraction lithography, immersion photolithography, zone-plate-array lithography (ZPAL), absorbance-modulation optical lithography and nanomembrane assembly.
The NSL at MIT was also noted for innovations in post-lithography processing for applications in: short-channel, single-electron and quantum-effect devices; graphoepitaxy and directed self-assembly; nanomagnetic, photonic-crystal and microphotonic devices; and high quality gratings for lasers, x-ray astronomy, spectroscopy and neutral-atom diffraction, the latter using free-standing gratings of 10,000 lines/mm that were unique in the world.
LumArray’s business model is based on commercializing the NSL culture by continuously improving nanofabrication technology and providing nanofabrication service to the academic, commercial and defense sectors. LumArray’s staff are all former members of MIT’s NSL.
In general, LumArray’s products are customized to user specifications. Products include: (1) linear and variable-line-space (VLS) X-ray and VUV diffraction gratings for monochromators and spectrometers; (2) diffractive-focusing optics; (3) computer-generated holograms (CGH) for metrology, security and anti-counterfeiting; (4) wire-grid polarizing beam splitters; (5) photomasks; (6) imprint molds and templates; (7) photonic devices; and (8) structures and devices for biotech.
LumArray’s ZP-150 maskless photolithography system is based on zone-plate-array lithography (ZPAL), a technology invented at MIT’s NanoStructures Lab. The following graphics illustrate ZPAL and show LumArray’s ZP-150 within its environmental enclosure.
