TEM & STEM Products
TEM Specimen Preparation
Cut, etch, polish, and freezing tools for TEM/STEM.
TEM Holders
TEM Specimen Holders
Cooling, heating, straining, EDS, cryo- and vacuum transfer tools for TEM/STEM.
TEM Imaging Spectroscopy
TEM Imaging & Spectroscopy
High-performance CMOS, CCD and direction detection cameras, plus EELS, EFTEM & STEM tools.
High speed STEMPack EDS
TEM Analysis
EELS, EDS, EFTEM, STEM, tomography, and 3D analysis tools.
SEM Products
SEM Specimen Preparation
SEM Specimen Preparation
Cut, etch, polish and freezing tools for SEM.
SEM Specimen Stages
Cooling, heating, straining, cryo-transfer and control tools for SEM.
Mono CL
SEM Imaging & Spectroscopy
Cathodoluminescence, electrical property and serial-block face imaging tools.
3View 3D Image
SEM Analysis
Tomography and 3D analysis tools.
Semiconductor Materials & Devices
COMMON CHALLENGES
Emerging materials for the microelectronics industry possess a number of unique properties that make them particularly desirable to shrink device geometries and develop novel 3D architectures. Specific material properties include their extreme strength, flexibility, optical transparency and thermal conductivity. While researchers focus an enormous amount of effort on the fabrication and characterization of these materials, integration of these materials into new products and their subsequent industrialization continues to be a challenge. These challenges commonly affect the precision of a required process and repeatable yield of devices as they are industrialized. Useful information to prevent or mitigate these challenges include:
Atomic composition of material or device
Influence on transistor device control
Chemical properties
Robustness and ease of analysis to deliver clear insight into material properties
INNOVATIVE TECHNIQUES
To adequately characterize and understand semiconductor materials or devices, you must first ensure each specimen is of the highest quality to resolve the material interface and properly controlled so you manipulate it, when necessary, under environmental stimuli. Once prepared, several techniques are available to better understand material complexities and failures to improve device performance.
Electron energy loss spectroscopy (EELS)
Atomic resolution chemical and compositional analysis.
Energy-filtered transmission electron microscopy (EFTEM)
Family of imaging techniques to enhance, map and quantify elements and chemicals in an image with nanometer resolution.
Spectrum imaging
Systematic method to generate a spatially resolved distribution of EELS data.
Imaging
Award winning, high resolution imaging tools help you to understand material growth, devices ultrastructure and failures.
In-situ
Real-time observation of growth processes, chemical reactions and oxidation, irradiation effects, mechanical, magnetic, and ferroelectric properties.
Specimen preparation
High-performance tools to cut, etch, polish and freeze samples for your unique SEM, TEM or STEM application.
Energy dispersive x-ray spectroscopy (EDS/EDX)
Useful to elucidate elemental or chemical characterization of a sample.
Electron backscatter diffraction (EBSD)
Helps you examine crystallographic orientation or texture of materials.
Visit light emitting materials and devices or batteries and energy storage to learn more about related applications.
