Particle Measuring Systems is part of Spectris plc, the expert in providing insight through precision measurement. Spectris’ global group of businesses are focused on delivering value beyond measure for all our stakeholders. We target global, attractive and sustainable markets, where growth and high returns are supported by long-term drivers. Precision is at the heart of what we do. We provide customers with expert insight through our advanced instruments and test equipment, augmented by the power of our software and services. This equips customers with the ability to reduce time to market, improve processes, quality and yield. In this way, Spectris know-how creates value for our wider society, as our customers design, develop, test and manufacture their products to make the world a cleaner, healthier and more productive place. Spectris is headquartered in Egham, Surrey, United Kingdom, the Company employs approximately 9,000 people located in more than 30 countries.
Contamination Control for the Semiconductor Industry
Particle Measuring Systems (PMS®) has the application expertise and particle monitoring instruments with the industry leading sensitivity you need to reduce yield loss.
Particle Measuring Systems PMS can provide you with particle monitoring solutions to determine how clean your semiconductor or microelectronics manufacturing is.
By continuously counting particles when and where products (water, chemicals, air) are at risk, we provide the global expertise and high-performance laser particle counters you count on.
Particle Measuring Systems PMS is the only company to reliably provide you with the highest particle counting sensitivity for chemicals, DI water, and airborne applications:
UPS DI
≥ 20 nm in UPW/DI Water
20 nm Chemical particle counter by Particle Measuring Systems
≥ 20 nm in Chemicals
Air and Gas
≥ 100 nm in Air and Gas
Molecular
≥ 70 ppt in Molecular
Our complete particle monitoring solutions provide you with the software, knowledge and quality service for seamless application
Facility Monitoring Software
Facility Monitoring Systems Software
Project Services
FMS Project Services
Education & Training
Particle Monitoring Education & Training
Particle Monitoring for Chemicals
Process chemicals are used in many steps to fabricate semiconductor and other critical products, and their purity is critical to maximize product yields and performance. Particle monitoring in process chemicals, from the chemical manufacturing point to the final use-point of the product, is extremely important in today’s clean processes. The use of on-line continuous particle monitoring enables process or facility engineers to respond rapidly to changes in chemical purity levels throughout the chemical distribution process. Our chemical batch sampling particle monitoring solutions have the versatility for a variety of applications and unmatched sensitivity at 20 nm.
Particle Monitoring for Ultra-Pure Water
Many precision manufacturing processes use ultra-pure water (UPW) / DI Water for critical cleaning and rinsing steps. For advanced semiconductor processing, UPW processes must maintain very low particle concentration levels, measured at the 20 nm level. UPW is also commonly used for chemical dilution and flushing steps within chemical blending and distribution systems. The use of continuous online particle counters, either at the final water purification step or at the wafer point-of-use, provides UPW facility and fab process engineers the critical particle data needed to effectively manage the water purification and wafer cleaning processes.
Particle Counters for Gases
Sophisticated technology manufacturing relies on ultra-high purity gases in order to produce leading edge semiconductors, LED/OLED displays, disk drives, and precision optics with high yields. These gases are ultimately supplied directly to process tools to purge and protect the product, or to contribute to process reactions which positively transform the product. However, when poor quality gas is delivered, yields decrease due to a contribution of point defects, reduced thin film adhesion, and electrical property changes due to ionic contaminants. To ensure gas quality meets particle specifications, monitoring is implemented at the gas source and within Continuous Quality Control (CQC) systems. Laser particle counters combined with high pressure diffusers are used to check and troubleshoot gas quality in the downstream distribution piping or as a validation test of gas component cleanliness. An effective strategy combines continuous and periodic monitoring throughout the gas flow path to ensure the highest purity gas is delivered to the final point of use.
Particle Counters for Air
Cleanrooms are controlled environments where product manufacturing quality can be impacted by particulate contamination. These cleanrooms use active air filtration systems that reduce airborne particulates to specified limits. Monitoring these airborne particulates provides useful data on the environment’s filtration, sources of contamination, and potential impact to the product or process. Selecting an aerosol particle counter is a choice influenced by the specific application and budget.
Airborne Molecular Contamination
By changing the chemical, physical, electrical, or optical properties of highly engineered surfaces, airborne molecular contamination (AMC) can cause yield loss, product degradation, and loss of process control. Our AMC monitors help you detect contamination quickly.
Particle Monitoring Knowledge / Papers
Particle Monitors
Chem 20™ Chemical Particle Counter
Chemical Particle Counter: Chem 20™
World’s first 20 nm chemical particle counter, detects larger concentrations of particles with better statistics than competitive products.
Ultra DI® 20 Liquid Particle Counter
20 nm Liquid Particle Counter: Ultra DI® 20
Designed for ultrapure water systems, this liquid particle counter’s low zero count, large sample volume and high counting efficiency provides unsurpassed contamination detection at 20 nm sensitivity.
syringe liquid particle sampler SLS 20
Syringe Liquid Particle Sampler: SLS-20
For batch sampling applications of Particle Measuring Systems’ Chem 20 and Chem 20-HI particle counters
AirSentry® II Mobile Airborne Molecular Contamination Detection System
AMC Monitor: AirSentry® II Airborne Molecular Contamination
Designed to enhance fixed Airborne Molecular Contamination (AMC) monitoring programs, the AirSentry II Mobile AMC Monitor is the first truly mobile system for monitoring airborne molecular contamination in cleanrooms. Mobility plays an important part in a strategic airborne molecular contamination monitoring program, allowing contamination sources to be quickly located, quantified and eliminated.
Lasair® III 110 Airborne Particle Counter
0.1 Micron Particle Counter: Lasair® III 110
The only true .1 micron particle counter, providing real-time measurement of yield-impacting cleanroom particles with three configurations.
Lasair Pro aerosol particle counter
Airborne Particle Counter: Lasair® Pro
Designed for intuitive and reliable portable and remote airborne particle counting. Meets the latest data integrity requirements, positioned for future compliance.
Airnet II 4 Channel Air Particle Sensor
Airnet® II Particle Sensor (4 Channel)
The Airnet particle sensor meets the specifications of ISO 21501-4 to measure the size and number of particles suspended in the air for real-time monitoring of defect-causing particles.
remote particle counter IsoAir Pro Plus from Particle Measuring Systems (PMS)
Remote Particle Counter: IsoAir® Pro-Plus
The next generation IsoAir® Pro-Plus Remote Particle Counter is designed for minimum downtime and multiple option flexibility.
Syringe Liquid Particle Sampler
Syringe Liquid Particle Sampler: SLS
Uses a precision syringe and simple flow-path for delivering chemical samples from a sample vessel or chemical container, directly to the particle sensor for liquid particle counter batch sampling.
LiQuilaz® II E Series Liquid Particle Counter
Laser Particle Counter: LiQuilaz® II E Series
Laser Particle Counter Spectrometer for Liquids: a volumetric particle counter that measures the entire liquid stream so you know exactly what particles…
AMC Monitoring AirSentry® II Point-of-Use Ion Airborne Molecular Contamination Mobility Spectrometer
AMC Monitoring: AirSentry® II Point-of-Use Ion Mobility Spectrometer
The AirSentry II AMC Monitoring family of ion mobility spectrometers for airborne molecular contamination (AMC) detect and alert users to small concentrations or changes in airborne levels of chlorides, acids, amines and ammonia-containing species.
CLS-700 T Corrosives Particle Counter
Corrosive Liquid Particle Sampler: CLS-700
A compression sampler combined with a LiQuilaz® II particle counter for effective measurement of particles in fluids contained in unpressurized vessels.
LiQuilaz® II S Series Liquid Particle Counter
Liquid Particle Counter: LiQuilaz® II S Series
Liquid Particle Counting Spectrometer by Particle Measuring Systems PMS: a volumetric liquid particle counter that measures the entire stream so you know exactly what particles…
SamplerSight Software
SamplerSight Software
A user-friendly software program for operating batch-based liquid particle measurement systems. Provides a comprehensive view of the batch information.
HSLIS-M50e Liquid Particle Counter
Deionized Water Particle Counter: HSLIS-M50e
Provides continuous, real-time monitoring of contamination levels in deionized water.
HSLIS-M65e Liquid Particle Counter
Liquid Particle Counter: HSLIS-M65e
Particle Measuring Systems’ HSLIS M65e liquid particle counter provides continuous, real-time particle monitoring of contamination levels in corrosive liquids, including hydrogen fluoride (HF).
Particle Counter Software: DataAnalyst
DataAnalyst Software helps you understand the data coming from your particle counter for an easy and low-cost way to manage data, including maintaining electronic records.
Facility Net Monitoring Software
Facility Net Monitoring Software
Real-time and historical data display for all Particle Measuring Systems particle counters, molecular contamination monitors and various third-party products.
HPGP-101-C High Pressure Gas Probe
HPGP-101-C High Pressure Gas Probe
Provides reliable in-line contamination monitoring for process gases at line pressure
HSLIS-M100e Liquid Particle Counter
Chemical Particle Counter: HSLIS-M100e
Provides continuous, real-time chemical particle monitoring of contamination levels in corrosive liquids, including hydrogen fluoride (HF).
Ultra DI® 50 Liquid Particle Counter
DI Water Particle Counter: Ultra DI® 50
DI water Particle Counter designed for ultrapure water systems: its low zero count, large sample volume and high counting efficiency provide unsurpassed performance at 50 nm sensitivity.
UltraChem® 100 Liquid Particle Counter
Liquid Particle Counter for Chemicals: UltraChem® 100
The Ultrachem 100 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect particles as small as 100 nm in chemicals with high molecular scatter.
UltraChem® 40 Liquid Particle Counter
Chemical Particle Counter: UltraChem® 40
The UltraChem® 40 Chemical Particle Counter from Particle Measuring Systems detects 40 nm particles in chemicals with high molecular scatter.
HandiLaz Mini II
Handheld Particle Counter: Handilaz® Mini II
Ergonomically designed handheld particle counter, that fits in the palm of your hand for convenient cleanroom monitoring
IsoAir 310P Particle Sensor
IsoAir® 310P Remote Particle Sensor
Real-time remote cleanroom particle sensor gives quick notification of particle anomalies, detecting 0.3 and 5.0 µm for GMP and FDA compliance.
