SEIREN KST Corp.

We will offer a variety of deposition processes and various films with wafer of research and development applications involved in the semiconductor manufacturing process.

Rich processing menu of specialized manufacturer unique will meet the various needs of customers.

In addition, its own super-thick thermal oxide film formation technology is the material that is essential

to the optical device to support the optical communication.

Our products and technologies have been adopted to communication equipment

manufacturers and optical component manufacturers worldwide.

>Thick film applications here

Process Line-up

※There are also things that can’t be processed by the wafer size.

※In addition, because the other films can also, please say a hope. Please contact us for details.

Our Clean Room

Process Service

“Super-thick thermal oxide film” applications

Undercladding wafer for AWG

With respect to optical waveguides (AWG), the so-called undercladding layer, which is the lowermost SiO2 film, has a critical effect on the process yield.The Super-thick thermal oxidized films of KST World have the leading share of the global market thanks to their excellent surface cleanliness and stable film quality.

Guaranteed specifications

Standard product line-up

※The above wafer size and thickness, are described our standard products.

※Other sizes and thicknesses are also available. (Up to a maximum thickness of 30μm)

Refractive index plane distribution data

Surface roughness data

Sales of Semiconductor Wafers

We Sales of semiconductor wafers

has a global network for supplying silicon wafers, quartz wafers, compound wafers, and glass substrates to meet the needs of customers. We can also supply tailor-made products. We proposes the most cost-effective products depending on the customer’s application. The silicon wafers, which we use for our own products too, inspected in the clean room. Custmers can rely on the substrate materials we supply.

－Silicon Wafers－ For semiconductor and for optical communication, offers as various other product applications. Size and process, you can offer a product that is tailored to your needs, such as the surface orientation and thickness. Monitor wafer Dummy grade wafer Epitaxial wafer

－Glass Substrates－ We offer a variety of glass substrates combined with the shape you wish. Blue plate glass (soda glass) Borosilicate glass SCHOTT Inc. TEMPAX Float, CORNING, Inc. PYREX White plate glass 　SCHOTT Inc. B270, BK7 Alkali-free glass 　CORNING Inc. EAGLE XG

－Various composite substrate－ We, SOQ substrate (Silicon on Quartz), have been made the handling of SOS substrate (Silicon on Sapphire). Silicon photonics, optoelectronics, be applied to applications such as RF device is expected. SOQ, also because it responds to the consultation for composite materials other than SOS board, do not hesitate to contact us.

Ion Implantation Services

We can meet widely ranging requirements for ion implantation with various ion implanters and offer analysis services with various analysis devices.

Ion implantation services

※ Constraints of size of wafer may be imposed depending on the measureing equipment.

Analyze services

Sheet resistance measurement, crystal fault detection, surface impurities analysis,

impurities profile analysis, minor constituent analysis, and film thickness measurement

※ Constraints may be imposed depending on the type of ion and size of wafer.

Major facilities

Our Equipment

SOI Wafer of SEIREN KST

SOI（Silicon on Insulator）Wafer is a silicon wafer which is a structured single crystalized layer on oxidized layer and used in the field of high speed LSI, low power LSI, powerdevice, MEMS.

Except for normal SOI, we provide special SOI wafer such as Cavity SOI wafer or Thick BOX SOI wafer.

Cavity SOI will be a good performance on reducing process steps or yield loss, and this would be the possibility for reducing huge cost cutting.

Also, Thick BOX SOI wafer is made by KST’s unique super thick thermal oxidized layer technique which has never been existed before, and possible to make silicon photonics, or super high resistivity powerdevice in the world.

Capability