Our competences in substrate processing
Development and production of fully-automated single wafer processing equipment for coating, developing, cleaning, lift-off, vapor priming, etching, heating/cooling of substrates (amc-series)
Development and production of semi-automated single wafer processing equipment for coating, developing, cleaning, lift-off, vapor priming, etching, heating/cooling of substrates (amr-series) for R&D, laboratories, small-lot produtction
Development of process modules
Software-design (amcoss ams PILOT software for process control)
Development of innovative equipment features
HDMS batch processes
Tempering of processes

Our competences in optics
Production of plane and curved optical components
Thin-film-coating with plasma-assisted coating technologies
Electro plating and electroless plating
Strip coating and reworking of used components
Assembly of optical components
Testing (spectrophotometer, interferometer)
Product-specific test setups
Pyrometer calibration
Design of optical parts
Optical simulation

Our competences in engineering and assembly
Mechanical design
Electrical and software engineering
Spin coating and functional coatings (e.g. wear resistant)
Bonding techniques
Ceramic thick-film technologies
Coordinate-measuring technologies
X-Ray fluorescence
Electron microscopy with EDX
Assembly and testing

Fully automatic single-wafer processing
Our amc series offers compact, individually configurable, fully automatic single-wafer processing equipment for a great variety of process options and manifold requirements in terms of throughput and flexibility.

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amcoss amc 2000+
Semi-automatic single-wafer processing
The semi-automatic single-wafer processing machines of our modular amr series, as well as both models of our amt tabletop hotplate have been optimized for the requirements in the highly flexible field of single-wafer and small-lot production of wafer sizes between 2“ and 300 mm.

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amr 200 Semi-automated wafer processing_1
Automatic HMDS batch-wafer processing
Our amv 200 batch equipment increases efficiency of HMDS processing of substrates because a large number of substrates can be processed simultaneously, and process time is a lot shorter than with HMDS ovens. So, throughput noticeably rises.

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amcoss amv200 batch-wafer processing equipment
Digital process control ams PILOT (software)
Our modern, self-explanatory ams PILOT software provides for intelligent and complete control of all processes in amcoss equipment or other manufacturers´ machines. It complies with Semi Standard E95-1101.

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Process­ temperature control (heat exchangers & chillers)
In order to control process temperature in microsystems or other manufacturing technologies amcoss offers amh heat exchangers as well as amh chillers for temperatures ranging from 0 °C to 95 °C. They replace temperature control units of other manufacturers.

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amcoss amh 090 und amh 050
amcoss vending machine
Sophisticated accessories for our amcoss equipment or rather for retrofitting of machines from other manufacturers, e.g. our trap tank system and a vending machine for the optimum storage and supply on demand of resists within the production process supplement and complete our broad range of products.

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What’s new at amcoss?
amcoss wafer processing equipment contributes to increase in productivity at Jenoptik in Berlin-Adlershof
28. JULY 2022 | PRODUCTS
Read more about the 👉 interesting application of an amcoss amc single wafer processing tool, its features and how it is being used at Jenoptik Berlin-Adlershof.

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The team for our
We need clever experts, talented heads, flexible makers, and
definitely new colleagues!

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Check your possibilities on our carreer page
Get exciting insights into our team and working practices on our carreer website amcoss.sucht-dich.at

Great variety of process options on compact platforms
Perfectly uniform resist layers with up to 6 different resists in one process bowl.

amcoss processes overview coating
Many applications, best results as well as puddle- and spray-developing within the same bowl.

amcoss processes overview developing
amcoss processes overview 
amcoss processes overview 2
A variety of etching processes and high-efficiency due to a novel etchant recycling method

With our single- and batch-wafer processing equipment a great variety of different processes for coating, developing, cleaning, lift-off and cooling/heating of substrates can be realized. Many clever and useful features are standard and various selectable options do offer individual benefits as required.

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Flexible combinations for manifold cleaning procedures with a variety of cleaning media.

amcoss processes overview cleaning
Safe, effective, and user-friendly with conventional or novel DMSO lift-off.

amcoss processes overview lift-off
For adjustable substrate temperature control through a great variety of hot- and coolplate technologies.

amcoss processes overview heating cooling
The perfect wafer-handler for every requirement thanks to a huge selection of end-effectors.

amcoss processes overview wafer-handling
Not everyone can do, what we do
amcoss company building

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We, amcoss GmbH, are an innovative, internationally operating High-Tech company in the semiconductor and microsystems technology industry. amcoss is in the possession of vast expert knowledge in the field of substrate processing as well as with devices for process temperature control. Well known manufacturers in the market are our customers.

Our head office is located in Feldkirch (Vorarlberg, Austria,) in a modern, industrial region characterized by medium sized businesses, in the most western part of Austria. From here we sell our products and services around the globe.

Overview of company departments
Equipment & Systems for single- and batch-wafer processing
Coating, developing, cleaning, lift-off, heating/cooling, software, HMDS, temperature control

Engineering components for optics and mechatronics
E.g. lenses, filters, mirrors, reflectors, fiber-optics, wafer-chucks, wafer-handlers, wafer-end-effectors, etc.

Refurbishment/repair of optical & mechanical components
E.g. lenses, mirrors, reflector plates, shutters, image shifters, exposure chucks, lamphouses, ball bearings, zoom-lenses, masking-blades, Wafertec pumps, etc.

Extensive know-how in optics and mechatronics
For many years we have been offering extensive engineering and highly specialized repair services for quality components in optics and mechatronics (photolithography, RTP, CVD, FPI, metrology and plasma), carried out in our specialized in-house laboratory. amcoss also cooperates with strong, specialized partners all around the world.


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