Heidelberg Instruments is a world leader in the design, development and manufacture of maskless laser lithography systems for the fabrication of micro-structures, serving the global photolithography community in both the direct writing field and in photomask fabrication. Application areas include MEMS, micro-optics, advanced packaging (3DIC), IC, flat panel displays (FPD), micro-fluidics, sensors, and analog and digital electronic components.
µMLA Maskless Aligner
VPG+ 800/1100/1400 Volume Pattern Generators
MLA150 Maskless Aligner
ULTRA Semiconductor Mask Writer
MLA300 Maskless Aligner
DWL 66+ Laser Lithography System
DWL 2000/4000 GS Laser Lithography Systems