Excimer UV Irradiation systemdetail
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Excimer VUV Lamps QEF35ST Size of irradiation
35φmm
Power of irradiation
126nm:5mW/cm2
172nm:15mW/cm2
193nm:10mW/cm2
222nm:10mW/cm2
4inch Excimer UV irradiation unit QEF100 Size of irradiation
100φmm
Power of irradiation
126nm:5mW/cm2
172nm:25mW/cm2
193nm:10mW/cm2
222nm:10mW/cm2
6inch Excimer UV irradiation unit QEV160 Size of irradiation
176×176mm
Power of irradiation
172nm:10mW/cm2
222nm:10mW/cm2
6inch high power Excimer UV irradiation unit QEF160 Size of irradiation
167×167mm
Power of irradiation
126nm:5mW/cm2
172nm:30mW/cm2
222nm:15mW/cm2
8inch Excimer UV irradiation unit QEV230 Size of irradiation
230×230mm
Power of irradiation
172nm:10mW/cm2
222nm:10mW/cm2
8inch high power Excimer UV irradiation unit QEF230 Size of irradiation
218×218mm
Power of irradiation
126nm:5mW/cm2
172nm:30mW/cm2
222nm:15mW/cm2
12inch Excimer UV irradiation unit QEV360 Size of irradiation
340×340mm
Power of irradiation
172nm:10mW/cm2
222nm:10mW/cm2
300mm high power Excimer UV irradiation unit QEF300 Size of irradiation
Φ320mm
Power of irradiation
126nm:5mW/cm2
172nm:30mW/cm2
222nm:15mW/cm2
Film , Flat panel QEX500
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QEX1600 Dimension
1600mm
Power of irradiation
Scan Type
172nm:70mW/cm2
Bach Type
172nm:10mW/cm2
Excimer VUV lamp
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UV-LED irradiation unitdetail
Aspect irradiation UV-LED unit High Power(Select)
365nm:500mW/cm2
385nm:500mW/cm2
405nm:500mW/cm2
Standard Power(Select)
365nm:100mW/cm2
405nm:100mW/cm2
Line UV-LED unit High Power(Select)
365nm:2000mW/cm2
385nm:2000mW/cm2
405nm:2000mW/cm2
Standard Power(Select)
365nm:300mW/cm2
405nm:300mW/cm2
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measurement devicedetail
UV Monitor
Contact angle measurement device
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Introduction of Excimer Irradiation systemdetail
Flat panel
Photomask
Semiconductor
Others LED,LD
Organic films
