Thermal Diffusion Furnace

Thick Film and SMD (Surface Mounting Device), IMS, screen-printing on stainless steel technology, ensuring a full-service custom design.

Manufacture Furnaces. Refurbishment and relocation of diffusion furnaces and RTP equipment. Spare parts

Crystal growing furnaces (Si, GaAs, Sapphire) and parts, wafer laser marking machine, wafer handling manipulator, wafer diffusion furnace, thermal process equipment, quartz crucible manufacturing equipment.

Advanced heat treatment equipment for production of power semiconductors, (Si, SiC, GaN), organic EL (OLED), MEMS, and VCSEL, for Packaging (Fan-Out WLP/PLP, Wafer Bump, others), liquid crystal displays (LCD) and organic EL (OLED).

Solar energy manufacturing equipment, solar cells & modules, and solar power solutions,

Crystal growing equipment for sapphire (HDC, Kyropolus), Si (CZ), InSb, GaAs, In. Vaccum coating equipment. Thermal diffusion equipment. Thermal vacuum test equipment. pBN and BN ceramic parts

Vacuum systems for semiconductors, microelectronics and SMD.

PCB, Photo Chemical Milling (PCM), Surface Finishing, Thermal Processing Furnaces and Ovens, Automation Equipment. Solar production equipment.

Automatic, batch type, reducing atmosphere and vacuum coldwall furnaces and turnkey high vacuum systems for ceramic to metal and brazing technology as applied to electron tubes and similar devices.

High temperature, high vacuum and controlled atmosphere furnaces.

ALOX FURNACE Designed for realizing the wet thermal oxidation of III-V compound semiconductors

Nanjing Advanced Semiconductor Technology (NAST), Co., Ltd specializes in the production of semiconductor-grade silicon material, including optimized hot zone and full-automatic process of crystal growth.

heat treatment systems for producing power semiconductors, silicon and compound semiconductors, solar batteries, organic EL (OLED), polyimide and MEMS. Our product lineup covers heat treatments from a low-temperature range to 1850°C.

Thermal Process Equipment: CVD, Diffusion, Oxidation, Annealing.

Diffusion furnaces for specific technology requirements, whether it be LED, MEMS, PV, Nano or Semiconductor.

ALD, anneal, diffusion, vacuum furnaces. Chillers, hot and cold chambers. Display manufacturing equipment

industrial and laboratory ovens and furnaces, and environmental temperature cycling and stability test chambers

Laboratory and industrial furnaces and ovens.

Production equipment and turnkey solutions for PV, semiconductor and microelectronics. Diffusion, oxidation, annealing, CVD equipment. Furnaces for advanced packaging.

Wet processing technology and products for the semiconductor and wafer level packaging (WLP) industries.