Semiconductor industry
Semiconductor industry
Semiconductors are different from conductors and non-conductors in circuit characteristics. Their conduction is directional, so that semiconductors can be used to manufacture logic circuits, and the circuit has the function of processing information, and has the characteristics of small size and strong information processing. Especially in the semiconductor industry, the wafer size has been all the way from 8-inch wafers to 12-inch wafers. As the weight increases, the type of handling in the semiconductor industry is also a major test. The application of front-opening wafer transfer box (FOUP) can not only solve the problem of wafer handling, but also ensure a high degree of cleanliness, and can support suspended automatic handling vehicles (OHT).
Wafer automatic warehouse
Reduce labor costs, equipment can get higher utilization, but also reduce the labor intensity of employees, through automated warehousing to transport the goods to the precise place, and strengthen the overall goods management efficiency.
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Clean room grade storage (Stocker)
1. High-precision automation equipment. 2. Reliable and predictable performance. 3. Wafer transfer can be transferred in a clean and controlled environment.
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65 tons unmanned truck
1. Use of dust-free grade. 2. It can move forward/backward/transversely/obliquely/turn on the spot. 3. Ribbon guide. 4. Self-developed lithium battery. 5. Use the obstacle detection system to stop before colliding with an obstacle.
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Clean room grade unmanned guided vehicle (Mobile Robot)
1. High-precision automation equipment. 2. High recognition ability and positioning accuracy. 3. Optimization of efficiency. 4. Unmanned operation at night, working 24 hours a day.
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Wafer transfer equipment for the semiconductor industry
1. High output. 2. Built-in hardware and security lock. 3. Flexible arrangement of components such as robotic arm and Track system. 4. Completely dust-free.
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Wafer Transfer Equipment (EFEM)
There are 2 Port, 3 Port and 4 Port for different needs.
