The Extrel VeraSpec™ APIMS from Extrel have the speed, sensitivity, and ease-of-use to continuously monitor Nitrogen, Argon, Helium, Oxygen, and Hydrogen supply streams and rapidly report ppt-level contamination to protect the electronics fabrication process.
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Extrel VeraSpec APIMS
Atmospheric Pressure Ionization Mass Spectrometer
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veraspec apims
Extrel MAX300-LG
High Performence Quantitative Gas Analyzer
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