Founded in 1999, LayTec has quickly become the world market leader in the field of in-situ metrology for LED and LASER production. In 2008, LayTec started to market its proven expertise for R&D and industrial applications beyond the semiconductor industry: we developed advanced in-line metrology solutions for large-area deposition techniques such as amorphous, polycrystalline and organic thin-films in PV and display industries.   In 2009, 2010, and 2011, LayTec was ranked as one of the 50 fastest-growing technology companies in Germany. In 2011, LayTec acquired the assets of the former competitor ORS (Optical Reference Systems), which is now LayTec UK. The new subsidiary adds further valuable technologies to LayTec metrology portfolio.
Currently, the company has more than 2000 metrology systems installed at customer sites around the world, 75% of which are in Asia, 10% in North America and 15% in Europe. LayTec offers a worldwide customer support and service network including local representatives.

LayTec product portfolio covers all areas of process monitoring and control and offers all required solutions for process control from one source: in-situ, in-line, lab-line and map-line metrology. This enables complete integration and smooth communication of the metrology components with each other and with the process equipment. We make it easy to keep an eye and to control the quality at every step of the production process. Our modular technology platform offers the best-in-class metrology solution for your specific needs:

In-situ metrology systems are atached to deposition systems on one or several view ports and observe in real-time the formation of the thin film throughout the thin film deposition process.   ... more


In-line metrology systems are integrated into production lines for comprehensive process control during substrate transfer between deposition chambers.   ... more


LayTec's lab-line tools are used in labs or in at-line production for quality assessment, testing and certification, in particular by PV module manufacturers. ...more

 We develop OEM metrology solutions together with thin-film equipment manufacturers to guarantee the best metrology performance, full integration and compatibility with the equipment as well as an extensive technical support. … more

LayTec metrology tools provide access to all key parameters during deposition processes in real time – either in-situ during the process or in-line during substrate transfer between deposition chambers. We help you  develop new processes, optimize film quality, enhance production efficiency and reduce costs. Our integrated metrology solutions are available for a steadily growing number of industrial processes and materials.

Optoelectronics: LEDs, lasers, OLEDs
Electronics: logic & memory, RF electronics, power electronics
Display manufacturing


Sputter deposition


SEMI materials / compound
SEMI materials / advanced silicon
Amorphous thin films / polycrystalline thin films
Organic thin films
Other advanced materials

Product portfolio

In-situ metrology:

EpiCurve® TT
Pyro 400

In-line metrology:

X Link®
EddyCus® TF inline

Lab-line metrology

X Link off-line
EddyCus TF lab

Map-line metrology:

EddyCus® TF map Hybrid

Advanced R&D
In-situ Metrology
In-line Metrology
At-line Metrology
Software Solutions


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