Creating Manufacturing Innovations for a Connected World - Canon Semiconductor Lithography Equipment
The most important step in semiconductor device fabrication is the lithography where a circuit pattern is transferred from a mask to a wafer or panel by precision Semiconductor Lithography Equipment commonly referred to as steppers or scanners.
Canon has developed a lineup of Semiconductor Lithography Equipment designed to meet the technical requirements of a wide range of applications in addition to traditional semiconductor wafer processing.
KrF Scanners / Steppers
FPA-6300ES6a
High Resolution / High Productivity KrF Scanner
FPA-6300ESW
Wide-Field / High Productivity KrF Scanner
FPA-3030EX6
KrF Stepper for IoT devices
i-line Steppers for Front-End-Of-the-Line (FEOL) Applications
FPA-5550iZ2
High Productivity / High Overlay Accuracy i-line Stepper
FPA-5510iX
Wide-Field / High Resolution i-line Stepper
FPA-3030i5+
i-line Stepper for IoT and MEMS devices
FPA-3030i5a
i-Line Stepper supporting reduced Cost-of-Ownership manufacturing for small substrates
FPA-3030iWa
Low NA i-line stepper for power devices, IoT related devices, and smaller substrates of 200mm or less
i-line Steppers for Back-End-Of-the-Line (BEOL) and Advanced Packaging Applications
FPA-5520iV
HR Option / LF Option
i-line stepper for advanced packaging with an optional lineup supporting high resolution and large exposure field
FPA-8000iW
i-line stepper compatible with large panels at 1.0 μm resolution
