GigaLane Equipment Business includes semiconductor, MEMS & LED industries. Its main product is ICP Etcher which are having Deep Silicon Etcher, LED ICP Etcher, Metal Etcher and Dielectric material Etchers. DRIE and LED Etcher especially are appreciated Equipment Division [Business] has a wealth of experience and skills in its best quality from many customers in the world.
ICP Etcher
● 2inch-8inch Sapphire, Si, SiC, GaAs, LN/LT Substrate
● PSS, GaN, SiC, GaAs, Polyimide, Metal, Dielectric films, Etc.
● Tray Type(Conventional/Face Down)
● Standalone(ESC, In-line Asher Optional)
Deep Si Etcher
● 6inch-12inch Deep Silicon Etcher
● Shallow & Deep Si Trench, TSV
(Through Si Via), Si Thinning & Sawing
● Cycle & non-Cycle Process available
Nano Imprinter
● 2inch-8inch, Nano to Micro Pattern
● LED, Display, Other Electric Devices
● Flexible Resin Mold
● Coater in-line or optional
Large area imprinting machine
●Up to 5G, Nano to Micro Pattern
●LED, Display, Other Electric Devices
●Flexible Resin Mold
●Coater optional
