EBARA is a worldwide leading global manufacturer of vacuum and semiconductor systems used in the production of wafers, liquid crystals, solar cells and other products requiring advanced technology. EBARA has the second largest global market share for CMP systems. With a development department in Fujisawa and manufacturing in Kumamoto, EBARA can rapidly respond to customers’ needs and achieve mass production. EBARA Corporation was founded in November 1912 and is headquartered in Tokyo, Japan.
EBARA Precision Machinery Europe GmbH (EPME) was founded in 1994 as subsidiary of the Japanese EBARA Corporation for the field of Semiconductor and related markets. EPME covers Europe, Middle East/Africa and Eastern Europe. 148 employees (2018) are engaged in sales, service, applications and engineering of a broad product range, such as the realization of comprehensive systems in the Semiconductor and Solar industry. Our fully equipped Service Centre located near Edinburgh/Scotland employs highly skilled vacuum engineers to maintain and refurbish our vacuum pumps. This facility also services 3rd party brand pumps: dry pumps, turbo pumps, scroll pumps, wet pumps and associated components. We are located near our customers: Dresden, Hanau, Munich and Regensburg in Germany, Grenoble in France, Livingston in Great Britain, Dublin in Ireland, Migdal Ha'Emek and Kiryat Gat in Israel. EPME is further expanding its role by bringing to the market products, services and solutions which are distinguished by technical leadership, high quality and reliability, low energy consumption. EPME staff feature are known for their high quality orientation and customer commitment. We work for the top 20 semiconductor manufacturers.
© EBARA - the EV-M502
© EBARA - the EV-M502
Dry vacuum pumps made by EBARA stand for their reliability, robustness and long runtime. They make it possible to reduce the cost of ownership. The perfect investment.
© EBARA - a view into the overhaul centre in Livingston
© EBARA - a view into the overhaul centre in Livingston
A long tradition and over 25 years expertise in dry vacuum pumps our overhaul centre in Livingston (UK) work on over 1,200 pumps a year. Next to EBARA pumps also third party pumps are overhauled there.
