Impedans provide you with intelligent sensing platforms for radio-frequency (RF) and plasma process monitoring. Our products find applications in fundamental research, process development, tool design, process control and fault detection and classification (FDC). We serve a wide range of industries, due to the ubiquitous nature of RF and plasma processing, such as semiconductor, vacuum coating, medical device, hard disk and aerospace among many others.

Our value proposition is that we provide you with an independent diagnosis of your process health, using intelligent, network-enabled sensing platforms, in conjunction with our vast experience in RF and plasma systems, to help you solve the most complex processing issues.


Substrate Level Measurement
Semion RFEA System
Semion 3 keV System
Semion Pulsed DC
Vertex RFEA System
Quantum RFEA System
RF Voltage-Current (VI) Probes

RF Voltage-Current (VI) Probes
Octiv Mono 2.0
Octiv Poly 2.0
Octiv Suite 2.0
Moduli RF Spectrometer
Moduli RF Event Detector
Bulk Plasma Measurement


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