Single Crystal Pulling
Single Crystal Pulling
Quartz crucibles
Up to 800 mm OD
Epitaxy
Epitaxy
High purity susceptors
SiC coated graphite
Clean, Durable Ceramic Components for OEM Semiconductor Processing Equipment
CoorsTek engineers semiconductor-grade ceramics for your OEM semi fabrication tools and wafer handling components. Work with our experts to develop semiconductor processing components that last longer, reduce cycle times, and improve yields.
Related Links
Presentation:
Ceramic Solutions Enabling the Evolution of Semiconductor Processing, Ceramics Expo 2018
Article:
Ceramic Industry: Semiconductor-Grade Ceramics Enable Future Electronics, June 2017
Deposition
Deposition
CVD, PVD & ALD
ECP/ECD
Etch
Etch
Plasma etch (dry etch)
High voltage RF
High Temp Processing
High Temp Processing
Rapid thermal process
Anneal, oxidation, epi
Ion Implant
Ion Implant
Air bearing guides
Scale mounts
Lithography & Wafer Inspection
Lithography & Wafer Inspection
Photomask substrates
Wafer chucks & tables
Diffusion & LPCVD Processing
Diffusion & LPCVD Processing
Batch diffusion
LPCVD
Wafer Planarization (CMP)
Wafer Planarization (CMP)
CMP polishing tables
Direct sintered SiC
General Applications & Wafer Handling
General Applications & Wafer Handling
End effectors
Heaters
