Wafer Sorter
KT FAB Sorter has designed for FAB enviroment, it support full automation
KT FAB Sorter has designed for FAB enviroment, it support full automation and related FAB automation and SEMI Standard. Various wafer size, Carrier applicable.
Wafer Mounting System
KT Wafer mounter system made for back lap grinded wafer handling, OHT, FAB Automation Various type of BG tape applicable
KT Wafer mounter system made for back lap grinded wafer handling, OHT, FAB Automation Various type of BG tape applicable.
Auto Scanning System
Wafer Surface Etching Scan Equipment
Vapor phase decomposition(VPD) inductively coupled plasma-mass spectrometry(ICP-MS) is one of the most utilized analytical techniques to monitor trace metals on wafer surfaces.
Bulk Etching System
Wafer Surface Bulk Etching Scan Equipment
Bulk Etching system is a full automatic sampling tool for scanning of contaminant particles, metal impurity of the wafer layer with chemical solution.
300mm FOUP Opener
200mm & 300mm combined FOUP Opener
FOUP Opener is a load port for FOUP with the automatic door open module. FOUP Opener is assembled with process equipments and helps to keep micro environment during process and transfer.
300mm EFEM System
EFEM system prevents particle generation and contamination during Loading / Unloading of wafer under micro environment
EFEM system prevents particle generation and contamination during Loading / Unloading of wafer under micro environment.
Inspection EFEM System
INSPECTION & EFEM Integrated equipment
Integrated EFEM & Vision System minimizes particels and wafer contamination during wafer transfer and process in 300mm(or 200mm) in Fab.This integrated system enable user to minimizes foot print with low COO
Auto Jar Packing & Unpacking System
Auto Jar Packing System consist of 200, 300mm cassette-only load port and unload port for wafer jar boxes, wafer in the cassette can be packed or unpacked into a wafer jar box by the transfer robot.And wafers are normally packed into a jar box with clean sheets.
Auto Tape Detach System
Auto Tape Detach System made for separate the ring frame and adhesive tape after collecting gooddie chip
Auto Tape Detach System made for separate the ring frame and adhesive tape after collecting gooddie chip.And it designed tape disposal and recycle.It support FAB Automation.
Low Frequency RFID Reader
The product that reads and writes transponders by using low frequency of 134.2 kHz
The product is RFID reader that reads and writes transponders by using low frequency of 134.2 kHz.It is optimized to operate for environment of semiconductor fabrication.It consists of four kinds of components such as a reader, a antenna, a communication / power cable.
