Semiconductor Inspection
Systems
Intego’s comprehensive portfolio of defect inspection, overlay and critical dimension metrology, as well as data analysis systems are specifically designed to support the semiconductor industry from initial product development to high volume manufacturing. Manual, semi-automated or fully-automated tool configurations are available for the quality assurance for front-end and back-end processes.
Typical inspection objectives are the detection of surface, material and process defects for bare, epitaxial, patterned and diced wafers. Both (semi) transparent and standard opaque wafers can be inspected with Intego’s systems. Inspection solutions for standard and advanced semiconductor materials like Si, SiC, GaN, GaAs, Ge as well as for device manufacturing processes of LED, OLED and MEMS can be offered.
The innovative modular tool concept allows a configuration of multiple inspection stages perfectly adapted according to customer's requirements. These innovative inspection systems combine many different inspection methods in just one tool and thus impress with a fascinating tool performance at high throughput and convincing cost of ownership. A continuous development of these systems including the wafer handling takes place in close cooperation with Intego’s customers.
We offer solutions for:
Bare wafers
• As-cut, grinded and polished wafers
• Surface, edge and material inspection
Epitaxial and patterned wafers
• Unpatterned and patterned epiwafers
• Defect detection and metrology
Diced wafers
• Kerf inspection and metrology
• Post dicing inspection
Special topics
• Custom-made inspection solutions
• Si, SiC, GaN, GaAs, LED, MEMS, ...
Intego offers standard systems and customer-specific solutions for quality control in the solar industry. The entire value chain is covered. Precise measurements and sorting criteria help to detect disturbances in quality at an early stage, to counteract them and to optimize the processes. By controlling processes, production yields can be increased and reproducible quality can be ensured in the final inspection.
With an Intego system, you receive an inspection system tailored to your needs, which is optimally integrated into your specific production process. Our modular design relies on pre-developed and tested standard components.
We have the following systems for you:
Prüfung von Silizium Blöcken
• Detection of SiC/SiN in bulk
• Geometry measurement
Inspection of wafers
• Detection of microcracks
• Grain analysis
Inspektion von Zellen
• Detection of microcracks
• Quality control of printings
Inspection of solar modules
• String measurements
• Breakage of cells
MODULUM Luminescense
• PL and modulated lifetime measurement
• PV reasearch and development
Ceramics and Glass Inspection
Systems
Due to their special material properties, ceramic and glass components are the basis of many high-tech products. The same properties make the production complex and costly. Substrate defects that lead to failure of finished components should be avoided at all costs. For this reason, early automated optical inspection is essential.
For the inspection of sapphire and quartz glass Intego has developed systems to detect both external and internal defects and can also provide cutting suggestions. Using index matching it is possible to test rough or uneven glass profiles.
For the inspection of ceramic components Intego offers solutions specifically tailored to the respective testing task. Our modular design uses standard components that have already been developed and tested and in most cases only requires minimal adaptation.
We offer solutions for:
Ceramics
• Detection of particles, holes, scratches, chipping
• Geometry measurement, discoloration and flatness
Quartz glass
• Scratches, particles and crystal defects
• Inclusions, bubbles and streaks
Sapphire
• Detection of inclusions and grain defects
• C-axis determination and optimised coring
