Nanosystem Solutions, Inc. was established in December of 2004 with support from the National Institute of Advanced Industrial Science and Technology. With a focus on our unique optical technology at our core, we started as a research and development venture that addresses needs using specialized technology in the fields of nano manufacturing and measurement.
Since our founding, our corporate philosophy of
1. Creating products with real users in mind
2. Providing results with the greatest value using the fewest resources
3. Fair individual evaluation through operational transparency
has led to all of our staff, albeit small in number, working together to come as far as we have today.

Presently, we operate in the business of maskless lithography equipment, which is lithography equipment utilizing digital micro mirror devices (DMD) and not requiring masks. We also focus on the development and design of semiconductor equipment and survey instruments, bioanalysis, and the development and design of synthetic devices and systems. In particular, our work in maskless lithography equipment was originally focused on government agencies, but by shifting to a more industrial focus, we are confident that we have been able to meet an even broader range of needs. We have achieved the delivery of 60 units to date.

In 2015, we moved our headquarters and manufacturing base to Okinawa. The reason for this was that we believed we would be able to pursue aggressive expansion in Asian countries such as Taiwan, China, and Korea, which have seen remarkable growth in the field of semiconductors. What’s more, for highly temperature-dependent optical equipment, Okinawa serves as an ideal environment, with an average yearly temperature of 23 degrees Celsius. By making this move, we were able to reduce energy consumption related to heating and cooling, and we have been able to leverage the fact that we are surrounded by ocean, minimizing the risks associated with land transportation.

Nanosystem Solutions may be a small company, but we dig deep when looking at our own technology, and will continue to aspire to the world’s number one artisan group specializing in optical lasers and nano image processing. In order to accomplish this, we must maintain an innovative perspective that takes on the challenge of expanding into new industries, and it is important for us to keep the soul of the artisan, supported by a masterful command of technology.

Solution for Fine Processing


We have been engaged in various inspection and development production of the measuring equipment in the semiconductor manufacturing process, and raised a technique through work in response to the high demand of our customers. Finally, we were able to have “Maskless Lithography equipment DL-1000”.
Digital Micromirror Device and all of our cultivated optics technology are reflected in DL-1000.
The center of the nanofabrication technology is a lithography process, but we believe that our DL-1000 would have a possibility to raise a technology development speed of a wide field including the field of semiconductor, liquid crystal, bio relations drastically.

And also, we are now process of development of special laser production. This will enable us to put emphasis on development of the laser processing equipment which can be directly-processable to materials.

We continuously focus on the field of optics technology which includes “the light” with great potential, and also we pursue offering and developing a new source of light and special optical products integrated into precision equipment in various fields.

Maskless Lithography tool DL-1000

Solution for inspection / measurement


The semiconductor device is produced on a silicon (Si)-based crystal. We have put various inspection tools for Si-based crystal Si-wafer for many years in the market.
We believe that the inspection technology to be concerned with a flatness degree of the Si wafer which is manufactured by the fusion of the particularly high optics technique and image processing technology are especially we proud of.
We have such a various line-up unique inspection tools based on the technology of core competence.
We have the know-how of the optics, image processing technology that can support a use of various special measurement and inspection.
We aim to be a leading company of Si wafer inspection and measurement tools to use strength of our technology.

New Business


Foundry Business

We are engaged in a plan to foundry business for use of our original Maskless Lithography tool and Laser processing tool. We are working on manufacture by commissioning business of the special glass including a precision mold and sapphire.

Development of Laser Submicron Technology

Development of Precise Laser Processing Technology is supported by Okinawa new industrial research & technology support project.

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