›Product Introduction
●Quartz product line
・Line heater CLH series
・Chemical bath CB series
・Line heater chemical bath applied products
・Hot water tank
●Drying equipment
・Spin dryer
・Auto balance spin dryer
●Aqua static drying equipment
・Aqua static cleaning/drying equipment
●Single-wafer automatic processing equipment
・Scrubbing equipment
●Batch type WET processing equipment
・Nitride etching equipment
・Fully automatic wet etching equipment
・Fully automatic organic solvent etching equipment
・Quartz tube cleaning equipment
