Chinese Academy of Sciences Shenyang Scientific Instrument Co., Ltd. (hereinafter referred to as "the company") was founded in 1958. The company's headquarters is located in Hunnan District, Shenyang City, Liaoning Province, covering an area of ​​110 acres and a building area of ​​35,000 square meters. Over the years, the company has focused on the research and development of high vacuum, ultra-high vacuum, and ultra-clean vacuum technology. It is the research and production base for integrated circuit equipment and vacuum equipment in my country. National Engineering Technology Research Center for Vacuum Instruments and Equipment" and "National Engineering Laboratory for Vacuum Technology and Equipment" and other scientific research platforms.

Product advantages
Created in 1958

Product advantages
Provide high-quality products and services to more than 2,000 customers

Product advantages
Construction area of ​​35,000 square meters

  The company is mainly engaged in the research and development, production and sales of dry vacuum pumps, vacuum instruments and equipment, and provides related technical services. The company's products mainly include series of Roots dry pumps, series of scroll dry pumps, large scientific devices, vacuum thin film equipment and new material preparation equipment. The company has undertaken the national "863 Program", "02 Special Program", "National Key R&D Program" and other national-level scientific and technological projects, and has realized the batch application of domestic dry vacuum pumps in the field of integrated circuits through independent research and development innovation, breaking the market in Europe, America and Japan. The long-term monopoly of enterprises on similar products has realized the import substitution of key equipment. The company has long been committed to the R&D and manufacturing of high-end scientific research instruments and equipment, and has contributed to the construction and development of my country's major scientific and technological infrastructure. In the field of vacuum coating, the company has developed a number of technologies such as magnetron sputtering, ion beam sputtering, electron beam evaporation, high temperature vacuum oil-free lubrication, high performance and high stability beam source furnace, and composite coating. Through years of research and innovation, the company has developed the sixth-generation molecular beam epitaxy equipment.

  The company has successively won 6 National Science and Technology Progress Awards, 20 Chinese Academy of Sciences and Provincial and Ministerial Science and Technology Progress Awards, and has 71 patents. Intellectual Property Advantage Enterprise, Liaoning Province Technology Innovation Demonstration Enterprise, Liaoning Province Innovative Small and Medium Enterprise, Liaoning Province Provincial Enterprise Technology Center, etc.

  The company has 2 wholly-owned subsidiaries - Shanghai Shangkaiyi Vacuum Technology Co., Ltd., Zhongkeyi (Nantong) Semiconductor Equipment Co., Ltd.; 1 branch - Chinese Academy of Sciences Shenyang Scientific Instrument Co., Ltd. Shanghai Branch.


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