is a global manufacturer of plasma etch, deposition, and advanced packaging equipment for the specialty semiconductor and nanotechnology markets.
Since 1974, Plasma-Therm has been an innovator in plasma-processing technologies. The company now holds more than 150 U.S. and foreign patents for plasma processes and equipment inventions.
Recent Plasma-Therm innovations include the industry's first plasma dicing-on-tape solution. The Singulator® MDS-100 was introduced in 2013 and quickly earned repeat orders because of the advantages of plasma-based die singulation. Learn more about Singulator® products here.
In 2011 Plasma-Therm acquired Advanced Vacuum Europe of Lomma, Sweden. Established in 1993, Advanced Vacuum quickly grew and began principal sales for vacuum associated components. Advanced Vacuum also established itself as an exclusive distributor in the Nordic countries for first-tier vacuum components and systems companies, including Edwards Vacuum and Entergris. Learn more about Advanced Vacuum products here.
In 2015, Plasma-Therm acquired innovative plasma technology from the former Nanoplas France. The Odyssey HDRF technology enables low-temperature, damage-free removal of photoresists and organic polymer residues, capabilities that are especially important in MEMS, LED, and advanced packaging markets. Learn more about the Odyssey HDRF here.
In 2016, Plasma-Therm acquired Nano Etch Systems Inc. of California, a developer of ion beam etch IBE) and ion beam deposition (IBD) systems. Nano Etch Systems (NES) was founded in 2009. The companies Quazar IBE and IBD systems deliver best-in-class performance for ion beam etch and deposition needs. NES also produces ion beam source and Marathon™ grid upgrade solutions for existing systems from various manufacturers to cost-effectively improve performance and extend system life.
2017 saw Plasma-Therm form strategic sales alliances with two European companies; Memsstar & Trymax. Plasma-Therm acts as both companies' sale channels in the North American market.
In 2018 Plasma-Therm acquired two further technology companies; Kobus and Corial, both French companies and opened its European Head Office in Grenoble, France. Learn more about the Kobus platform here. Learn more about Corial products here.
In 2020 Plasma-Therm opened its UK office via the acquisition of JLS Designs Ltd of Somerton, UK. JLS was a specialty engineering company with a range of complementary products to Plasma-Therm and its wholly-owned subsidiary, Corial. Plasma-Therm UK is designated as the Specialty Process Equipment Group and supports customized “as-needed” solutions. Learn more about Plasma-Therm UK here.
In July 2020, Plasma-Therm opened a new process and technical support office located in Singapore. Learn more about Plasma-Therm Singapore here.
Plasma-Therm's reputation as an industry leader is supported by more than 40 years of focus on customer support, product innovation, reliability, and low cost of ownership. The success of Plasma-Therm systems in both high-volume manufacturing environments and research institutions has secured the company's status as a preferred supplier of plasma-process equipment. Plasma-Therm's plasma-processing and advanced-packaging solutions are used in research, pilot manufacturing, and volume production. Plasma-Therm is committed to the development of systems and services that meet the diverse requirements of our global customer base. The success of this commitment is recognized by VLSIresearch Customer Satisfaction awards, which Plasma-Therm has received every year since 2000.
Since 1974, Plasma-Therm has offered plasma etch and deposition solutions for specialty applications. All Plasma-Therm systems, from the Advanced Vacuum Tackachi ICP to VERSALNE®, Singulator®, and to the Vision™ Series, provide highly accurate, repeatable results.
Plasma-Therm has collaborated with strategic partners such as DISCO for the Advanced Packaging market and memsstar (ORBIS™ platform) for dry release of MEMS devices.
A wide range of material handling options, including load lock and cassette load modules, match Plasma-Therm systems to varied capacity requirements, from R&D labs to high-volume manufacturing.
All Plasma-Therm products are supported by award-winning service and support that ensures high uptime and consistent process results. Our customer-focused approach has been recognized with awards in the VLSIresearch Customer Satisfaction Survey every year since 2000.
Systems
VERSALINE® modular cluster systems
Singulator™ plasma dicing-on-tape
Vision™ Series open-load and load-lock plasma processing solutions
Takachi Series etch systems
QuaZar™ Systems
QuaZar™ Planetary IBE
LAPECVD™ large-area PECVD
Versalock™ etch and deposition systems
ORBIS™ for dry release/surface modification
Mask Etcher® photo mask etch
Odyssey HDRF™ low-temperature strip/clean
Kayen HDRF™ batch mode processing
NEO high temperature strip/clean
KOBUS products utilizing F.A.S.T.® and PECVD technologies
CORIAL Series compact and reliable etch and deposition systems
Certified pre-owned products
Software solutions
Process control with EndpointWorks®
Productivity enhancements
Demand for higher performance from smaller and more powerful products is continual. Plasma-Therm enables new technology by continually improving its plasma processing systems.
Today, our systems can produce smaller device structures, specific profiles, and high-quality thin films, while delivering exceptional reliability with low cost of ownership.
Plasma-Therm's expertise in plasma processing technologies makes it the preferred supplier to major manufacturers and research institutions in all technology markets.
Plasma-Therm products and technologies serve varied markets, including:
Die singulation/Advanced Packaging
Wireless
Photonics
Solid-state lighting
MEMS/NEMS
Nanotechnology
Renewable energy
Data storage
Photomask
R&D
