Innovative ideas for cleanroom production
Our engineers are constantly researching potential improvement in the area of factory automation and developments for innovative and competitive products, which keep your material flow moving optimally.
Product Overview
Wafer Handling Fabmatics
Handling
Systems for the handling of wafers, reticles and carriers in the semiconductor industry as well as of substrates in microelectronics and nanoelectronics
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Mobile Robot HERO FAB omni-directional driving
Transport
Automation through the use of stationary conveyor solutions as well as mobile and free-moving robotic systems
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FlatStocker installation with 200 storage bins at Frauenhofer IMPS Dresden
Storage
From automated systems for space-saving storage to RFID racks and purge systems
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RFID readers during assembly and cleaning
Identification
Reliable identification and localization of production lots in real time
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