IDE – technology leadership and optimum price / performance ratio
Today’s semiconductor OEM’s need partners that are technology leaders and are responsive to their business needs. IDE understands doubling the throughput at double the cost does not make a good investment. IDE’s broad technology portfolio and understanding of your system dynamics allow value engineering of the right solution for your equipment design.
IDE solutions achieve unparalleled results
Advanced lithography and inspection tools must move faster and have quicker settling times in order to achieve higher area throughputs. IDE’s technology leading products utilize a stage feed-forward option, high motor force outputs and high speed actuation to achieve industry leading results.
NGI Series
Active Vibration Isolation Modules
The most advanced isolation system on the market
Patented high vacuum compatible technology
0.5 Hz natural frequency
40dB isolation at 5 Hz; 60dB isolation at 20 Hz
Stage and floor feed-forward options
TCN Series
Active Vibration Isolation Modules
Market leader with over 12,000 units installed worldwide
Large bandwidth of isolation beginning at 0.7 Hz
Ultra-fast settling time
Stage and floor feed-forward options
STC Series
Active Vibration Platform
Sandwich style isolation platform
Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances
Compact design with integrated controller enables easy installation and tuning
Ultra-fast settling time
Stage and floor feed-forward options
IDE – system dynamics leadership delivers high throughput automation products providing the greatest placement accuracy
Providing a wide range of automation solutions, IDE covers a full spectrum of automation demands for current and future technology challenges. Wafer and mask handling systems and components are designed with high throughput, accuracy and reliability in mind. Equipment manufacturers can add their core competent, application specific hardware and software into an optimized equipment platform. Combining IDE’s expertise in automation and isolation technology, customized structural dynamic systems are available. These include frame, isolation, stage and automation components, or a subset of them. IDE Service Lifting Tools enable safe and efficient service tasks of any equipment subassembly, eliminating ergonomic impact to service engineers, and significantly reducing service costs and tool downtime in service events.
SLT Series
Service Lifting Tools
Payload up to several tons
Extremely accurate horizontal & vertical motion range
Cleanroom class ISO 1
Vacuum tool compatible
Tool integrated w/o footprint increase
SDS Series
Structural Dynamic System Platforms
SDS platforms allow high system throughput by maximum dynamic performance
Modular setup, comprising base frame and isolation, optionally also granite, stage, substrate handling and minienviroment
Handling Systems
For Wafer & Mask Handling
200/300mm wafer & mask handling robots
Wafer & (EUV) mask handling systems
