SENTECH Instruments develops, manufactures, and sells worldwide advanced quality instrumentation for Plasma Etching, PECVD, Atomic Layer Deposition, Thin Film Measurement (Spectroscopic Ellipsometry, Spectroscopic Reflectometry and Laser Ellipsometer) and Photovoltaics.
ICP RIE Etching system SI 500
Plasma etching (ICP, RIE)
PECVD (plasma deposition)
Atomic layer deposition
Spectroscopic-Ellipsometer-SENresearch-4.0
Spectroscopic ellipsometry
Laser ellipsometer
Reflectometer (FTP)
SENperc thickness measurement
Measurement tools for:
Crystalline silicon cells
Thin film solar cells
