We are a manufacturer mainly of semiconductor manufacturing equipment such as wafer cleaning machines, etching equipment, and spin dryers.
We manufacture small research machines to mass-produced automatic equipment as a company that can turn around according to customer needs.
We also develop and manufacture cleaning equipment for LCDs, compounds, organic ELs, FPDs, LEDs, etc. by making use of these technologies.

Wafer automatic cleaning device
Etching device
Spin cleaning device
Spin dryer
CVD equipment
Sputtering equipment
Vacuum deposition equipment
Dry etching equipment
Annealing equipment
CO2 cleaning device
Made-to-order equipment


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