E+H was founded in 1968 and offers since 1978, for more than 35 years now, a wide variety of measurement tools for the Semiconductor and PV in process control and laboratory characterization.
Contactless metrology tools for 1" up to 450mm Wafers consisting out of Silicon, Quartz, Sapphire etc, but also solutions for other materials such as plastic displays are available.
Most metrology tools can be integrated into our own full automated wafer handling solutions (belt driven, robot).
This long term support for our customers combined with robust, reliable, mature and low maintenance products makes E+H a strong partner on which you can rely on.
Manual Wafer Measurement Tools - MX Series
The MX base series are manual tools, where some of them can also be used as modules on E+H automatic robot tools or as OEM tools.
Please note that all technical tool specifications can be modified to your wishes in accordance with the physical limits of the tool.
Robot Sorters
Total Modular Concept
Maximum flexibility on integration of required components
Short production time
High lifespan
Low Maintenance
Robust design due to reusability of proved and tested components
More than 15 years experience with robot sorters
Choose from a large variety of existing tool designs or simply specify your requirements (e.g. metrology, stations count etc). We customize a tool perfectly fitting to your demands.
Robot Handling Systems
Single arm robots with one endeffector
Dual arm robots with two endeffectors
Track to enlarge the robot access area
All endeffectors are customized to your Wafers to ensure an optimal and safe transport.
Metrology Modules
Many of the E+H standard MX metrology tool series can be used on robot sorters, such as:
MX 10x series (Thickness)
MX 20x series (Geometry/Flattness: Thickness, Warp, Stress)
MX 60x series (Thickness, Resistivity)
MX 70x series (Thickness, Warp, Waviness, Roughness)
Software & Automation
All our MX tool series use one and the same Windows operating software MX-NT V2. It combines more than 20 years expericence in Semiconductor requirements.
Sorting by any gained characteristic, such as grouping by thickness or OCR code can be done by highly flexible and reusable recipes.
All data can be stored in a MS SQL Server data base or alternatively also into MS Access data bases.
Powerful software options such as a SECS/GEM automation interface or our similar proprietary Simple Soap Server One (S³O) interface allow seamless integration of E+H tools into your production plant.
PV/Solar Metrology Tools
Manual tools
Applications
Incoming Inspection
Sample Production Measurements
Process Qualification
Qualification of Production Tools
R&D and Engineering
Reference Measurements
Inline OEM System
E+H PV/Solar OEM inline metrology modules can be integrated into every production facility where metrology data is needed.
E+H Capacitive Sensor Sytems
Please note: E+H sensors are sold directly to you without distributors. Please use our contact form in any case of questions.
Advantages of capacitive sensors
Non contact
Extreme resolution
No resolution restriction in theory since electromagnetic fields aren't restricted, e.g. by wave lengths of the used light.
Absolute accuracy
Extremly stable measurement signals. No interruption of signal, e.g. due to missing reflections.
No aging of the sensor
Optical system do age, since their light emitting sources age.
Can be used even in extreme environments,
e.g. nuclear radiation, near the absolute zero point (0 °F) or even within magnetic fields
Can also be used to measure thickness of non conductive materials such as plastic, foils, quartz, glass, ceramic etc
The sensors active area measures the average distance to the object. The roughness of an objects surface is automatically averaged by this. This is an unbeatable advantage compared to sensors with a very small spatial resolution when smaller irregularites should not be observed.
E+H Leading Technology
The quality of a capacitive sensor system can be rated by the sensors range, accuracy and precision in relation to the required size of the active sensor surface.
The E+H capative technology is now developed for more than 40 years.
E+Hs seamless construction of the entire sensor system, starting at the sensor, own special cables (constructed by E+H) and the sophisticated electronic lead to a unique world class sensor system.
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Applications
Dynamic measurement on turbines and motors
Displacement measuring on slide bearings
Concentricity measuring on axles
Measuring of modulus of elasticity and thermal expansion
Distance measurements in lowest temperature technique
Check-up of gauges
Tolerance verification of mass-produced parts, e.g. for matching mechanical components
Thickness control of thin metallic sheets
Control of plastic foil thickness on production machines
Measuring of thickness, taper and bow of silicon wafers for the semicondutor production
and many more...
Products
Capacitive Sensors
Cables
Electronic distance meter
