M-100
| Equipment | M-100 |
|---|---|
| Type | PLC Control Manual system |
| Mask Size | up to 5”×5” |
| Substrate Size | Piece to 4” |
| Resolution | 1㎛ |
| Alignment Accuracy | 1㎛ |
| Lamp & Power supply | 350W |
| Wave Length | 350~450nm |
| UV Intensity | 15~25㎽/㎠ |
| UV Beam Uniformity | 3% |
| Contact Mode | Vacuum / Hard / Soft / Proximity |
| Microscope | Dual CCD Zoom Microscope |
| Option | Anti-vibration table IR BSA CCD BSA |
M-150
| Equipment | M-150 |
|---|---|
| Type | PLC Control Manual system |
| Mask Size | up to 7”×7” |
| Substrate Size | Piece to 6” |
| Resolution | 1㎛ |
| Alignment Accuracy | 1㎛ |
| Lamp & Power supply | 350W |
| Wave Length | 350~450nm |
| UV Intensity | 15~25㎽/㎠ |
| UV Beam Uniformity | 3% |
| Contact Mode | Vacuum / Hard / Soft / Proximity |
| Microscope | Dual CCD Zoom Microscope |
| Option | Anti-vibration table IR BSA CCD BSA |
S-150
| Equipment | S-150 |
|---|---|
| Mask Size | 7” |
| Substrate Size | 6” |
| Substrate chuck moving mode | Manual/ (Z,θ motorized) |
| Lamp power | 1kw |
| Beam uniformity | 3~5% |
| UV Intensity | 365nm~450nm / 365nm : 20mw/㎠ |
| Resolution | 1um |
| Alignment accuracy | 1um |
| Operation | Manual / semi-auto |
| Contact mode | soft, hard, vacuum, proximity |
| Control type | Manual, touch, joystick |
P-150
| Equipment | P-150 |
|---|---|
| Type | Touch PC Control Manual system |
| Mask Size | up to 7”×7” |
| Substrate Size | Piece to 6” |
| Resolution | 1㎛ |
| Alignment Accuracy | 1㎛ |
| Lamp & Power supply | 350W |
| Wave Length | 350~450nm |
| UV Intensity | 15~25㎽/㎠ |
| UV Beam Uniformity | 3% |
| Contact Mode | Vacuum / Hard / Soft / Proximity |
| Microscope | Dual CCD Zoom Microscope |
| Option | Anti-vibration table IR BSA CCD BSA |
S-200
| Equipment | S-200 |
|---|---|
| Type | Touch PC Control & Joystick Semi-auto system |
| Mask Size | up to 7”×7”~14”×14” |
| Substrate Size | Piece to 6”~12’ |
| Stage | X, Y, X, θ Motorize control |
| Lamp & Power supply | 350W ~ 2000W |
| Wave Length | 350~450nm |
| UV Intensity | 15~25㎽/㎠ |
| UV Beam Uniformity | 3~5% |
| Resolution | 1um |
| Alignment accuracy | 1um |
| Contact Mode | Vacuum / Hard / Soft / Proximity |
| Control Mode | Manual / Semiauto / Joystick |
| Microscope | Dual CCD Zoom Motorize Microscope |
| Option | Anti-vibration table CCD BSA |
F-200
| Equipment | F-200 |
|---|---|
| Type | Touch PC Control & Joystick Semi-auto system |
| Mask Size | up to 9”×9” |
| Substrate Size | 8” |
| Stage | X, Y, X, θ Motorize control |
| Lamp & Power supply | 1000W |
| Wave Length | 350~450nm |
| UV Intensity | 15~25㎽/㎠ |
| UV Beam Uniformity | 3~5% |
| Resolution | 1um |
| Alignment accuracy | 1um |
| Contact Mode | Vacuum / Hard / Soft / Proximity |
| Control Mode | Full Auto |
| Microscope | Dual CCD Zoom Microscope |
| Option | Anti-vibration table CCD BSA |
S-300
| Equipment | S-300 |
|---|---|
| Type | Touch PC Control & Joystick Semi-auto system |
| Mask Size | up to 7”×7”~14”×14” |
| Substrate Size | Piece to 6’~12” |
| Stage | X, Y, X, θ Motorize control |
| Lamp & Power supply | 350W ~ 2000W |
| Wave Length | 350~450nm |
| UV Intensity | 15~25㎽/㎠ |
| UV Beam Uniformity | 3~5% |
| Resolution | 1um |
| Alignment accuracy | 1um |
| Contact Mode | Vacuum / Hard / Soft / Proximity |
| Control Mode | Manual / Semiauto / Joystick |
| Microscope | Dual CCD Zoom Motorize Microscope |
| Option | Anti-vibration table CCD BSA |
M-500
| Equipment | M-500 |
|---|---|
| Type | PLC Touch Control system |
| Mask Size | 500mm×500mm 이상 |
| Substrate Size | 370mm×470mm |
| Resolution | 10㎛ |
| Lamp & Power supply | 5000W |
| Wave Length | 350~450nm |
| UV Intensity | 15~20㎽/㎠ |
| UV Beam Uniformity | 5~7% |
| Contact Mode | Vacuum / Hard / Soft / Proximity |
| Microscope | Dual CCD Zoom Microscope |
| Option | X,Y,X,θ Motorizing Scope Motorizing |
T-700
| Equipment | T-700 |
|---|---|
| Beam Size | Up to 800 mm×800 mm |
| Resolution | Less Than 10㎛ [@PR] in Proximity |
| Alignment Accuracy | Less Than ± 5.0 ㎛ |
| Alignment | Semi Auto / Auto |
| Substrate Size | 700 mm×700 mm |
| Lamp Power | 8 kW NUV |
| Wave Length | 365 nm |
| UV Intensity | 20 mW/cm2 |
| UV Beam Uniformity | Less Than ± 5 % [700 mm×700 mm] |
| Contact Mode | Hard/Soft and Proximity |
| Chuck Incremental Z-Motion | Accuracy 1 ㎛ |
| Microscope | Dual Motorizing Zoom Microscope |
| Operation System | Auto, Semi Auto |
L-100
| Equipment | L-100 |
|---|---|
| Type | PLC Control Manual system |
| Mask Size | Max 7”×7” |
| Substrate Size | Piece to 6” |
| Resolution | 1㎛ |
| Alignment Accuracy | 1㎛ |
| UV Lamp & Power | UV LED & POWER SUPPLY |
| Wave Length | 365nm |
| UV Intensity | ~40㎽/㎠ |
| UV Beam Uniformity | 3~5% |
| Contact Mode | Vacuum / Hard / Soft / Proximity |
| Microscope | Dual CCD Zoom Microscope |
| Option | nti-vibration table IR BSA,CCD BSA |
